This fast-track silicon-on-insulator production facility started as design-build for an 88,500 SF greenfield stand-alone project that was changed to a 128,000 SF building “expansion” adjacent to and between existing operating facilities. Project scope includes installation of the first set of process tools with process gases (TCS, HCL, H2, UHPO, et al.), process exhaust and waste streams (including HF and O3 wastes) as well as the building systems necessary for an ISO Class 4 cleanroom environment inside the two-story facility with a 30’ deep basement. The revised scope includes process controls developed with significant owner input to ensure the controls followed their proprietary processes. It also includes vertical storage units for product staging.
